Individual holder
KIEHLBAUCH MARK W
US·5 granted patents·212 citations·filing 2007–2012
Individually held — no corporate assignee on record.
Top patents by PatentIndex Score
5 records- 0197US8274777B2High aspect ratio openingsKIEHLBAUCH MARK W·Filed 2008·Granted Sep 25, 2012·51 cites·17 claims
- 0297US8252194B2Methods of removing silicon oxideKIEHLBAUCH MARK W·Filed 2008·Granted Aug 28, 2012·156 cites·23 claims
- 0375US8318035B2Methods of finishing quartz glass surfaces and components made by the methodsKIEHLBAUCH MARK W·Filed 2007·Granted Nov 27, 2012·3 cites·32 claims
- 0473US9005473B2Gaseous compositions comprising hydrogen fluoride and an alkylated ammonia derivativeKIEHLBAUCH MARK W·Filed 2012·Granted Apr 14, 2015·2 cites·10 claims
- 0555US8760841B2High aspect ratio openingsKIEHLBAUCH MARK W·Filed 2012·Granted Jun 24, 2014·0 cites·16 claims
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