Assignee
KIESEL AXEL
DE·2 granted patents·10 citations·filing 2009–2011
Top patents by PatentIndex Score
2 records- 0182US8622783B2Method and system for controlling chemical mechanical polishing by controllably moving a slurry outletKIESEL AXEL·Filed 2011·Granted Jan 7, 2014·7 cites·17 claims
- 0270US8506770B2Electrochemical planarization system comprising enhanced electrolyte flowKIESEL AXEL·Filed 2009·Granted Aug 13, 2013·3 cites·17 claims
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