Assignee
KIM JA YUL
KR·2 granted patents·2 citations·filing 2012–2012
Top patents by PatentIndex Score
2 records- 0157US9287155B2Apparatus and method of controlling chuck, and exposure apparatus and control method thereofKIM JA YUL·Filed 2012·Granted Mar 15, 2016·1 cites·16 claims
- 0256US9069336B2Ultra-precision position control device and method for determining position and attitude information associated with a 6-degree-of-freedom stage thereofKIM JA YUL·Filed 2012·Granted Jun 30, 2015·1 cites·11 claims
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