Assignee
KIM JONG MUN
US·2 granted patents·2 pending applications·23 citations·filing 2006–2012
Top patents by PatentIndex Score
4 records- 0191US8187415B2Plasma etch reactor with distribution of etch gases across a wafer surface and a polymer oxidizing gas in an independently fed center gas zoneKIM JONG MUN·Filed 2006·Granted May 29, 2012·20 cites·9 claims
- 0272US8778207B2Plasma etch processes for boron-doped carbonaceous mask layersKIM JONG MUN·Filed 2012·Granted Jul 15, 2014·3 cites·20 claims
- 0341US2014056747A1Rotational clap suction/pressure deviceKIM JONG-MUN·Filed 2012·Application pending·0 cites
- 0438US2013122712A1Method of etching high aspect ratio features in a dielectric layerKIM JONG MUN·Filed 2012·Application pending·0 cites
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