Assignee

KIM LANCE

US·1 granted patent·2 citations·filing 2009–2009

Technology mixH10F1 H10P1

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1 record

0153US8524616B2Method of nonstoichiometric CVD dielectric film surface passivation for film roughness controlKIM LANCE·Filed 2009·Granted Sep 3, 2013·2 cites·15 claims

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