Assignee
KIM NAM HUN
KR·1 granted patent·3 pending applications·0 citations·filing 2005–2022
Top patents by PatentIndex Score
4 records- 0152US12451328B2Plasma source using planar helical coilKIM NAM HUN·Filed 2022·Granted Oct 21, 2025·0 cites·9 claims
- 0249US2025166968A1Plasma chamber for wafer etching and wafer etching method using plasma chamberKIM NAM HUN·Filed 2022·Application pending·0 cites
- 0335US2009151635A1Adaptively Coupled Plasma Source Having Uniform Magnetic Field Distribution and Plasma Chamber Having the SameKIM NAM HUN·Filed 2006·Application pending·0 cites
- 0431US2008223521A1Plasma Source Coil and Plasma Chamber Using the SameKIM NAM HUN·Filed 2005·Application pending·0 cites
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