Assignee
KIM SUNG-HYUCK
KR·1 granted patent·2 pending applications·0 citations·filing 2005–2012
Technology mixG03F3
Top patents by PatentIndex Score
3 records- 0138US8795929B2Pellicle having buffer zone and photomask structure having pellicleKIM SUNG-HYUCK·Filed 2012·Granted Aug 5, 2014·0 cites·17 claims
- 0230US2006019176A1Chromeless phase shift mask and method of fabricating the sameKIM SUNG-HYUCK·Filed 2005·Application pending·0 cites
- 0326US2010209826A1Apparatus for processing photomask, methods of using the same, and methods of processing photomaskKIM SUNG-HYUCK·Filed 2010·Application pending·0 cites
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Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →