Assignee
KITABATA MASAKI
0 granted patents·3 pending applications·0 citations·filing 2008–2009
Top patents by PatentIndex Score
3 records- 0152US2009026172A1Dry etching method and dry etching apparatusKITABATA MASAKI·Filed 2008·Application pending·0 cites
- 0249US2010078043A1Cleaning device and cleaning methodKITABATA MASAKI·Filed 2009·Application pending·0 cites
- 0317US2008314316A1Monitoring system and monitoring method for substrate production apparatusKITABATA MASAKI·Filed 2008·Application pending·0 cites
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