Assignee

KITADA HIROHO

JP·1 granted patent·1 pending application·6 citations·filing 2006–2009

Technology mixH01J2 H10P2 H01L1

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2 records

0171US8828257B2Plasma processing apparatus and operation method thereofKITADA HIROHO·Filed 2009·Granted Sep 9, 2014·6 cites·8 claims
0236US2007267145A1Sample table and plasma processing apparatus provided with the sameKITADA HIROHO·Filed 2006·Application pending·0 cites

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