Assignee
KITSUNAI HIROYUKI
JP·1 granted patent·2 pending applications·3 citations·filing 2005–2010
Top patents by PatentIndex Score
3 records- 0168US8653455B2Charged particle beam device and evaluation method using the charged particle beam deviceKITSUNAI HIROYUKI·Filed 2010·Granted Feb 18, 2014·3 cites·11 claims
- 0252US2008257863A1Plasma processing apparatus and method for stabilizing inner wall of processing chamberKITSUNAI HIROYUKI·Filed 2007·Application pending·0 cites
- 0339US2006151429A1Plasma processing methodKITSUNAI HIROYUKI·Filed 2005·Application pending·0 cites
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