Assignee
KIUCHI TOHRU
JP·11 granted patents·1 pending application·17 citations·filing 2006–2012
Top patents by PatentIndex Score
12 records- 0190US8235695B2Pattern forming device, pattern forming method, and device manufacturing methodKIUCHI TOHRU·Filed 2010·Granted Aug 7, 2012·6 cites·26 claims
- 0272US8440375B2Exposure method and electronic device manufacturing methodKIUCHI TOHRU·Filed 2008·Granted May 14, 2013·5 cites·32 claims
- 0371US8801307B2Substrate cartridge, substrate processing apparatus, substrate processing system, control apparatus, and method of manufacturing display elementKIUCHI TOHRU·Filed 2010·Granted Aug 12, 2014·2 cites·57 claims
- 0471US8289500B2Exposure apparatus, exposure method, and device manufacturing methodKIUCHI TOHRU·Filed 2009·Granted Oct 16, 2012·2 cites·16 claims
- 0565US8399263B2Method for measuring expansion/contraction, method for processing substrate, method for producing device, apparatus for measuring expansion/contraction, and apparatus for processing substrateKIUCHI TOHRU·Filed 2009·Granted Mar 19, 2013·2 cites·28 claims
- 0654US9152062B2Pattern forming device, pattern forming method, and device manufacturing methodKIUCHI TOHRU·Filed 2012·Granted Oct 6, 2015·0 cites·13 claims
- 0754US8922748B2Exposure apparatus, exposure method, and device manufacturing methodKIUCHI TOHRU·Filed 2012·Granted Dec 30, 2014·0 cites·25 claims
- 0850US8743341B2Immersion exposure apparatus and immersion exposure method, and device manufacturing methodKIUCHI TOHRU·Filed 2010·Granted Jun 3, 2014·0 cites·8 claims
- 0950US8508714B2Exposure apparatus, exposure method, and method for producing deviceKIUCHI TOHRU·Filed 2010·Granted Aug 13, 2013·0 cites·16 claims
- 1042US8780326B2Exposure apparatus, exposure method, and device manufacturing methodKIUCHI TOHRU·Filed 2006·Granted Jul 15, 2014·0 cites·20 claims
- 1142US8264666B2Exposure apparatus, exposure method, and method of manufacturing deviceKIUCHI TOHRU·Filed 2010·Granted Sep 11, 2012·0 cites·27 claims
- 1239US2013027684A1Exposure apparatus, substrate processing apparatus, and device manufacturing methodKIUCHI TOHRU·Filed 2011·Application pending·0 cites
Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →