Assignee
KLA TENCOR TECHNOLOGIES
US·14 granted patents·1 pending application·826 citations·filing 1999–2006
Top patents by PatentIndex Score
15 records- 0199US6633831B2Methods and systems for determining a critical dimension and a thin film characteristic of a specimenKLA TENCOR TECHNOLOGIES·Filed 2001·Granted Oct 14, 2003·362 cites·82 claims
- 0297US6673637B2Methods and systems for determining a presence of macro defects and overlay of a specimenKLA TENCOR TECHNOLOGIES·Filed 2001·Granted Jan 6, 2004·120 cites·83 claims
- 0394US6956660B2System and method for measuring properties of an object using a phase difference between two reflected light signalsKLA TENCOR TECHNOLOGIES·Filed 2004·Granted Oct 18, 2005·43 cites·52 claims
- 0494US6946394B2Methods and systems for determining a characteristic of a layer formed on a specimen by a deposition processKLA TENCOR TECHNOLOGIES·Filed 2001·Granted Sep 20, 2005·43 cites·64 claims
- 0593US7304735B2Broadband wavelength selective filterKLA TENCOR TECHNOLOGIES·Filed 2005·Granted Dec 4, 2007·29 cites·24 claims
- 0693US6866559B2Windows configurable to be coupled to a process tool or to be disposed within an opening in a polishing padKLA TENCOR TECHNOLOGIES·Filed 2003·Granted Mar 15, 2005·31 cites·90 claims
- 0792US6902855B2Qualifying patterns, patterning processes, or patterning apparatus in the fabrication of microlithographic patternsKLA TENCOR TECHNOLOGIES·Filed 2002·Granted Jun 7, 2005·108 cites·20 claims
- 0883US6879391B1Particle detection method and apparatusKLA TENCOR TECHNOLOGIES·Filed 2000·Granted Apr 12, 2005·26 cites·2 claims
- 0982US6646737B2Submicron dimensional calibration standards and methods of manufacture and useKLA TENCOR TECHNOLOGIES·Filed 2001·Granted Nov 11, 2003·19 cites·49 claims
- 1076US6891167B2Apparatus and method for applying feedback control to a magnetic lensKLA TENCOR TECHNOLOGIES·Filed 2001·Granted May 10, 2005·12 cites·20 claims
- 1173US6775051B2Systems and methods for scanning a beam of light across a specimenKLA TENCOR TECHNOLOGIES·Filed 2002·Granted Aug 10, 2004·16 cites·42 claims
- 1256US6930765B2Multiple spot size optical profilometer, ellipsometer, reflectometer and scatterometerKLA TENCOR TECHNOLOGIES·Filed 2002·Granted Aug 16, 2005·5 cites·24 claims
- 1355US6690010B1Chemical analysis of defects using electron appearance spectroscopyKLA TENCOR TECHNOLOGIES·Filed 1999·Granted Feb 10, 2004·10 cites·51 claims
- 1451US2006148383A1Methods and systems for detecting a presence of blobs on a specimen during a polishing processKLA TENCOR TECHNOLOGIES·Filed 2006·Application pending·0 cites
- 1543US6882437B2Method of detecting the thickness of thin film disks or wafersKLA TENCOR TECHNOLOGIES·Filed 2002·Granted Apr 19, 2005·2 cites·26 claims
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