Assignee
KLA TENCOR TECHNOLOGIES INC
US·5 granted patents·70 citations·filing 2003–2005
Top patents by PatentIndex Score
5 records- 0192US7269816B2Driven inspection or measurementKLA TENCOR TECHNOLOGIES INC·Filed 2005·Granted Sep 11, 2007·14 cites·22 claims
- 0285US6867606B2Multiple directional scans of test structures on semiconductor integrated circuitsKLA TENCOR TECHNOLOGIES INC·Filed 2003·Granted Mar 15, 2005·28 cites·6 claims
- 0370US7639419B2Inspection system using small catadioptric objectiveKLA TENCOR TECHNOLOGIES INC·Filed 2003·Granted Dec 29, 2009·10 cites·25 claims
- 0469US7115866B1Site stepping for electron beam micro analysisKLA TENCOR TECHNOLOGIES INC·Filed 2005·Granted Oct 3, 2006·4 cites·20 claims
- 0567US7106434B1Inspection toolKLA TENCOR TECHNOLOGIES INC·Filed 2003·Granted Sep 12, 2006·14 cites·20 claims
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