Assignee
KLA TENCOR TECHOLOGIES CORP
US·2 granted patents·15 citations·filing 2000–2008
Top patents by PatentIndex Score
2 records- 0174US6806966B1Copper CMP flatness monitor using grazing incidence interferometryKLA TENCOR TECHOLOGIES CORP·Filed 2000·Granted Oct 19, 2004·14 cites·41 claims
- 0252US7663746B2Method and apparatus for scanning, stitching and damping measurements of a double sided metrology inspection toolKLA TENCOR TECHOLOGIES CORP·Filed 2008·Granted Feb 16, 2010·1 cites·20 claims
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