Assignee
KNIPPELMEYER RAINER
DE·5 granted patents·1 pending application·68 citations·filing 2006–2011
Top patents by PatentIndex Score
6 records- 0196US9336981B2Charged particle detection system and multi-beamlet inspection systemKNIPPELMEYER RAINER·Filed 2011·Granted May 10, 2016·33 cites·15 claims
- 0293US8637834B2Particle-optical systems and arrangements and particle-optical components for such systems and arrangementsKNIPPELMEYER RAINER·Filed 2011·Granted Jan 28, 2014·17 cites·21 claims
- 0393US8097847B2Particle-optical systems and arrangements and particle-optical components for such systems and arrangementsKNIPPELMEYER RAINER·Filed 2009·Granted Jan 17, 2012·16 cites·12 claims
- 0465US8334701B2Repairing defectsKNIPPELMEYER RAINER·Filed 2009·Granted Dec 18, 2012·2 cites·24 claims
- 0558US2009159810A1Particle-Optical ComponentKNIPPELMEYER RAINER·Filed 2006·Application pending·0 cites
- 0647US8907277B2Reducing particle implantationKNIPPELMEYER RAINER·Filed 2009·Granted Dec 9, 2014·0 cites·25 claims
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