Assignee
KO CHUNG-CHI
TW·5 granted patents·1 pending application·8 citations·filing 2006–2011
Top patents by PatentIndex Score
6 records- 0186US8536064B2Double patterning strategy for contact hole and trench in photolithographyKO CHUNG-CHI·Filed 2010·Granted Sep 17, 2013·7 cites·18 claims
- 0265US8481412B2Method of and apparatus for active energy assist bakingKO CHUNG-CHI·Filed 2010·Granted Jul 9, 2013·1 cites·20 claims
- 0351US8629056B2Method for forming self-assembled mono-layer liner for cu/porous low-k interconnectionsKO CHUNG-CHI·Filed 2011·Granted Jan 14, 2014·0 cites·19 claims
- 0448US2007278682A1Self-assembled mono-layer liner for cu/porous low-k interconnectionsKO CHUNG-CHI·Filed 2006·Application pending·0 cites
- 0542US9087877B2Low-k interconnect structures with reduced RC delayKO CHUNG-CHI·Filed 2006·Granted Jul 21, 2015·0 cites·15 claims
- 0640US10312107B2Forming interconnect structure using plasma treated metal hard maskKO CHUNG CHI·Filed 2011·Granted Jun 4, 2019·0 cites·20 claims
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