Assignee
KOBAYASHI SENSHO
JP·3 granted patents·10 citations·filing 2011–2012
Top patents by PatentIndex Score
3 records- 0174US9147591B2Substrate processing apparatusKOBAYASHI SENSHO·Filed 2012·Granted Sep 29, 2015·4 cites·6 claims
- 0270US9230842B2Substrate processing apparatusKOBAYASHI SENSHO·Filed 2011·Granted Jan 5, 2016·3 cites·7 claims
- 0367US9228685B2Load lock deviceKOBAYASHI SENSHO·Filed 2011·Granted Jan 5, 2016·3 cites·12 claims
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