Assignee
KOBE PREC INC
US·2 granted patents·65 citations·filing 2000–2002
Technology mixH10P2
Top patents by PatentIndex Score
2 records- 0187US6406923B1Process for reclaiming wafer substratesKOBE PREC INC·Filed 2000·Granted Jun 18, 2002·45 cites·7 claims
- 0277US6884634B2Specifying method for Cu contamination processes and detecting method for Cu contamination during reclamation of silicon wafers, and reclamation method of silicon wafersKOBE PREC INC·Filed 2002·Granted Apr 26, 2005·20 cites·10 claims
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