Assignee
KOCH MICROELECTRONIC SERVICE C
US·3 granted patents·92 citations·filing 1999–1999
Top patents by PatentIndex Score
3 records- 0174US6338803B1Process for treating waste water containing hydrofluoric acid and mixed acid etchant wasteKOCH MICROELECTRONIC SERVICE C·Filed 1999·Granted Jan 15, 2002·48 cites·22 claims
- 0260US6203705B1Process for treating waste water containing copperKOCH MICROELECTRONIC SERVICE C·Filed 1999·Granted Mar 20, 2001·31 cites·5 claims
- 0338US6398964B1Process for treating aqueous waste containing copper and copper CMP particlesKOCH MICROELECTRONIC SERVICE C·Filed 1999·Granted Jun 4, 2002·13 cites·17 claims
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