Assignee
KOELMEL BLAKE R
US·3 granted patents·17 citations·filing 2009–2011
Top patents by PatentIndex Score
3 records- 0187US8548311B2Apparatus and method for improved control of heating and cooling of substratesKOELMEL BLAKE R·Filed 2009·Granted Oct 1, 2013·11 cites·11 claims
- 0277US9449858B2Transparent reflector plate for rapid thermal processing chamberKOELMEL BLAKE R·Filed 2011·Granted Sep 20, 2016·4 cites·11 claims
- 0366US8461022B2Methods and apparatus for aligning a substrate in a process chamberKOELMEL BLAKE R·Filed 2010·Granted Jun 11, 2013·2 cites·20 claims
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