Assignee
KOH CHA-WON
KR·3 granted patents·30 citations·filing 2011–2014
Top patents by PatentIndex Score
3 records- 0194US8278221B2Method of forming a hard mask and method of forming a fine pattern of semiconductor device using the sameKOH CHA-WON·Filed 2011·Granted Oct 2, 2012·18 cites·20 claims
- 0289US9147687B2Methods of fabricating semiconductor devicesKOH CHA-WON·Filed 2014·Granted Sep 29, 2015·10 cites·20 claims
- 0369US8557131B2Methods of forming fine patterns and methods of fabricating semiconductor devicesKOH CHA-WON·Filed 2011·Granted Oct 15, 2013·2 cites·20 claims
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