Assignee
KOOKJE ELECTRIC KOREA CO LTD
KR·1 granted patent·3 pending applications·10 citations·filing 2013–2014
Top patents by PatentIndex Score
4 records- 0181US10006146B2Cluster apparatus for treating substrateKOOKJE ELECTRIC KOREA CO LTD·Filed 2013·Granted Jun 26, 2018·10 cites·12 claims
- 0239US2016230282A1Heater member and substrate processing apparatus having the sameKOOKJE ELECTRIC KOREA CO LTD·Filed 2014·Application pending·0 cites
- 0338US2015364348A1Gas phase etching apparatusKOOKJE ELECTRIC KOREA CO LTD·Filed 2014·Application pending·0 cites
- 0433US2015083821A1Nozzle unit and substrate-processing system including the nozzle unitKOOKJE ELECTRIC KOREA CO LTD·Filed 2013·Application pending·0 cites
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