Assignee

KOSAKAI MAMORU

JP·2 granted patents·19 citations·filing 2011–2012

Technology mixH01L2 H10P2 B23Q1 G01K1 H02N1 H05B1

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2 records

0190US9343346B2Electrostatic chuck apparatusKOSAKAI MAMORU·Filed 2011·Granted May 17, 2016·17 cites·8 claims
0267US10502639B2Plate-shaped body for temperature measurement and temperature measuring apparatus provided with the sameKOSAKAI MAMORU·Filed 2012·Granted Dec 10, 2019·2 cites·12 claims

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