Assignee
KUBO TOMOHIRO
JP·2 granted patents·2 citations·filing 2010–2011
Top patents by PatentIndex Score
2 records- 0169US8457479B2Rapid thermal processing apparatus and method of manufacture of semiconductor deviceKUBO TOMOHIRO·Filed 2010·Granted Jun 4, 2013·2 cites·12 claims
- 0252US8304261B2Thermal treatment apparatus, thermal treatment method and method of manufacturing semiconductor deviceKUBO TOMOHIRO·Filed 2011·Granted Nov 6, 2012·0 cites·7 claims
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