Assignee
KUDO TAKEHITO
JP·3 granted patents·13 citations·filing 2007–2009
Top patents by PatentIndex Score
3 records- 0189US9146474B2Exposure method and apparatus, and method for fabricating device with light amount distribution having light larger and different linear polarization states in an on-axis area and a plurality of off-axis areasKUDO TAKEHITO·Filed 2009·Granted Sep 29, 2015·8 cites·42 claims
- 0285US8675177B2Exposure method and apparatus, and method for fabricating device with light amount distribution having light larger in first and second pairs of areasKUDO TAKEHITO·Filed 2007·Granted Mar 18, 2014·5 cites·19 claims
- 0358US9164393B2Exposure method and apparatus, and method for fabricating device with light amount distribution having light larger in four areasKUDO TAKEHITO·Filed 2007·Granted Oct 20, 2015·0 cites·28 claims
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