Assignee
KUMAZAWA MASATO
JP·2 granted patents·0 citations·filing 2007–2008
Top patents by PatentIndex Score
2 records- 0150US8305556B2Projection optical system, exposure apparatus, exposure method, display manufacturing method, mask, and mask manufacturing methodKUMAZAWA MASATO·Filed 2008·Granted Nov 6, 2012·0 cites·9 claims
- 0238US8130364B2Projection optical apparatus, exposure method and apparatus, photomask, and device and photomask manufacturing methodKUMAZAWA MASATO·Filed 2007·Granted Mar 6, 2012·0 cites·21 claims
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