Assignee
KUNNEN JOHAN GERTRUDIS CORNELIS
NL·3 granted patents·12 citations·filing 2012–2012
Top patents by PatentIndex Score
3 records- 0190US8970822B2Support table for a lithographic apparatus, lithographic apparatus and device manufacturing methodKUNNEN JOHAN GERTRUDIS CORNELIS·Filed 2012·Granted Mar 3, 2015·8 cites·20 claims
- 0274US9280063B2Substrate table assembly, an immersion lithographic apparatus and a device manufacturing methodKUNNEN JOHAN GERTRUDIS CORNELIS·Filed 2012·Granted Mar 8, 2016·3 cites·20 claims
- 0368US9897928B2Lithographic apparatus, support table for a lithographic apparatus and device manufacturing methodKUNNEN JOHAN GERTRUDIS CORNELIS·Filed 2012·Granted Feb 20, 2018·1 cites·20 claims
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