Assignee
KUWABARA HAJIME
JP·3 granted patents·1 pending application·9 citations·filing 2009–2010
Top patents by PatentIndex Score
4 records- 0165US9000402B2LPP EUV light source and method for producing the sameKUWABARA HAJIME·Filed 2010·Granted Apr 7, 2015·2 cites·9 claims
- 0257US8648536B2Plasma light sourceKUWABARA HAJIME·Filed 2010·Granted Feb 11, 2014·2 cites·7 claims
- 0353US8907567B2Plasma light source and plasma light generation methodKUWABARA HAJIME·Filed 2009·Granted Dec 9, 2014·5 cites·7 claims
- 0431US2012161631A1Plasma light source systemKUWABARA HAJIME·Filed 2010·Application pending·0 cites
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