Assignee

KUZNETSOV ALEXANDER

US·1 granted patent·67 citations·filing 2014–2014

Technology mixG01B1 G01N1 G03F1 G06F1 G16Z1

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0196US9291554B2Method of electromagnetic modeling of finite structures and finite illumination for metrology and inspectionKUZNETSOV ALEXANDER·Filed 2014·Granted Mar 22, 2016·67 cites·23 claims

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