Assignee

LAB FUR PHYSIKALISCHE ELEKTRON

CH·1 granted patent·48 citations·filing 1997–1997

Technology mixG01L1 G01N1 H10W1

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0172US6351390B1Method for applying a microsystem or a converter on a substrate, and device manufactured accordinglyLAB FUR PHYSIKALISCHE ELEKTRON·Filed 1997·Granted Feb 26, 2002·48 cites·21 claims

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