Assignee
LAM RES
US·5 granted patents·3 pending applications·97 citations·filing 1999–2009
Top patents by PatentIndex Score
8 records- 0192US6569004B1Polishing pad and method of manufactureLAM RES·Filed 1999·Granted May 27, 2003·69 cites·10 claims
- 0289US7884033B2Method of depositing fluids within a microelectric topography processing chamberLAM RES·Filed 2009·Granted Feb 8, 2011·7 cites·13 claims
- 0388US7779782B2Systems and methods affecting profiles of solutions dispensed across microelectronic topographies during electroless plating processesLAM RES·Filed 2005·Granted Aug 24, 2010·7 cites·21 claims
- 0488US7714441B2Barrier layer configurations and methods for processing microelectronic topographies having barrier layersLAM RES·Filed 2005·Granted May 11, 2010·7 cites·28 claims
- 0564US6878301B2Methods and apparatuses for trench depth detection and controlLAM RES·Filed 2003·Granted Apr 12, 2005·7 cites·20 claims
- 0664US2010062164A1Methods and Solutions for Preventing the Formation of Metal Particulate Defect Matter Upon a Substrate After a Plating ProcessLAM RES·Filed 2008·Application pending·0 cites
- 0751US2008149147A1Proximity head with configurable deliveryLAM RES·Filed 2007·Application pending·0 cites
- 0848US2010184301A1Methods for Preventing Precipitation of Etch Byproducts During an Etch Process and/or Subsequent Rinse ProcessLAM RES·Filed 2009·Application pending·0 cites
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