Assignee
LAMBDA PHYSIK AG
DE·135 granted patents·8 pending applications·2,379 citations·filing 1998–2007
Top patents by PatentIndex Score
143 records- 0195US6389045B1Optical pulse stretching and smoothing for ArF and F2 lithography excimer lasersLAMBDA PHYSIK AG·Filed 2000·Granted May 14, 2002·87 cites·39 claims
- 0294US7227881B2Master oscillator—power amplifier excimer laser systemLAMBDA PHYSIK AG·Filed 2006·Granted Jun 5, 2007·25 cites·12 claims
- 0394US6898216B1Reduction of laser speckle in photolithography by controlled disruption of spatial coherence of laser beamLAMBDA PHYSIK AG·Filed 2000·Granted May 24, 2005·51 cites·32 claims
- 0494US6580517B2Absolute wavelength calibration of lithography laser using multiple element or tandem see through hollow cathode lampLAMBDA PHYSIK AG·Filed 2001·Granted Jun 17, 2003·61 cites·20 claims
- 0593US6804327B2Method and apparatus for generating high output power gas discharge based source of extreme ultraviolet radiation and/or soft x-raysLAMBDA PHYSIK AG·Filed 2002·Granted Oct 12, 2004·89 cites·73 claims
- 0693US6243405B1Very stable excimer or molecular fluorine laserLAMBDA PHYSIK AG·Filed 2000·Granted Jun 5, 2001·61 cites·59 claims
- 0792US6614828B1Wavelength selector for laser with adjustable angular dispersionLAMBDA PHYSIK AG·Filed 2001·Granted Sep 2, 2003·35 cites·46 claims
- 0892US6389052B2Laser gas replenishment methodLAMBDA PHYSIK AG·Filed 2000·Granted May 14, 2002·32 cites·36 claims
- 0991US6577663B2Narrow bandwidth oscillator-amplifier systemLAMBDA PHYSIK AG·Filed 2001·Granted Jun 10, 2003·36 cites·88 claims
- 1091US6563853B2Gas performance control system for gas discharge lasersLAMBDA PHYSIK AG·Filed 2001·Granted May 13, 2003·46 cites·59 claims
- 1191US6529533B1Beam parameter monitoring unit for a molecular fluorine (F2) laserLAMBDA PHYSIK AG·Filed 2000·Granted Mar 4, 2003·40 cites·45 claims
- 1291US6442182B1Device for on-line control of output power of vacuum-UV laserLAMBDA PHYSIK AG·Filed 2000·Granted Aug 27, 2002·31 cites·60 claims
- 1390US6421365B1Narrow band excimer or molecular fluorine laser having an output coupling interferometerLAMBDA PHYSIK AG·Filed 2000·Granted Jul 16, 2002·27 cites·52 claims
- 1490US6381256B1Molecular fluorine laser with spectral linewidth of less than 1 pmLAMBDA PHYSIK AG·Filed 2000·Granted Apr 30, 2002·34 cites·91 claims
- 1589US6560254B2Line-narrowing module for high power laserLAMBDA PHYSIK AG·Filed 2002·Granted May 6, 2003·27 cites·24 claims
- 1689US6490308B2Laser gas replenishment methodLAMBDA PHYSIK AG·Filed 2002·Granted Dec 3, 2002·27 cites·27 claims
- 1789US6414438B1Method of producing short-wave radiation from a gas-discharge plasma and device for implementing itLAMBDA PHYSIK AG·Filed 2000·Granted Jul 2, 2002·64 cites·17 claims
- 1889US6327290B1Beam delivery system for molecular fluorine (F2) laserLAMBDA PHYSIK AG·Filed 2000·Granted Dec 4, 2001·27 cites·34 claims
- 1989US6272158B1Method and apparatus for wavelength calibrationLAMBDA PHYSIK AG·Filed 2000·Granted Aug 7, 2001·24 cites·39 claims
- 2088US6504861B2Laser gas replenishment methodLAMBDA PHYSIK AG·Filed 2002·Granted Jan 7, 2003·24 cites·23 claims
- 2187US6614584B1Laser frequency converter with automatic phase matching adjustmentLAMBDA PHYSIK AG·Filed 2001·Granted Sep 2, 2003·56 cites·16 claims
- 2287US6516013B1Laser beam monitoring apparatus and methodLAMBDA PHYSIK AG·Filed 2000·Granted Feb 4, 2003·30 cites·26 claims
- 2387US6393037B1Wavelength selector for laser with adjustable angular dispersionLAMBDA PHYSIK AG·Filed 1999·Granted May 21, 2002·62 cites·66 claims
- 2486US7184204B2Master-oscillator power-amplifier (MOPA) excimer or molecular fluorine laser system with long optics lifetimeLAMBDA PHYSIK AG·Filed 2004·Granted Feb 27, 2007·25 cites·52 claims
- 2586US6807205B1Precise monitor etalon calibration techniqueLAMBDA PHYSIK AG·Filed 2001·Granted Oct 19, 2004·26 cites·19 claims
- 2685US6834069B1Molecular fluorine laser with intracavity polarization enhancerLAMBDA PHYSIK AG·Filed 2002·Granted Dec 21, 2004·36 cites·56 claims
- 2785US6490306B2Molecular fluorine laser with spectral linewidth of less than 1 pmLAMBDA PHYSIK AG·Filed 2002·Granted Dec 3, 2002·18 cites·28 claims
- 2884US6603788B1Resonator for single line selectionLAMBDA PHYSIK AG·Filed 2000·Granted Aug 5, 2003·22 cites·67 claims
- 2984US6526085B2Performance control system and method for gas discharge lasersLAMBDA PHYSIK AG·Filed 2001·Granted Feb 25, 2003·25 cites·32 claims
- 3084US6493370B2Laser gas replenishment methodLAMBDA PHYSIK AG·Filed 2002·Granted Dec 10, 2002·16 cites·24 claims
- 3183US6747741B1Multiple-pass interferometric deviceLAMBDA PHYSIK AG·Filed 2001·Granted Jun 8, 2004·27 cites·49 claims
- 3282US6868106B1Resonator optics for high power UV lasersLAMBDA PHYSIK AG·Filed 2001·Granted Mar 15, 2005·17 cites·25 claims
- 3382US6727731B1Energy control for an excimer or molecular fluorine laserLAMBDA PHYSIK AG·Filed 2000·Granted Apr 27, 2004·27 cites·12 claims
- 3482US6700916B1E-diagnostic, laser simulator, automated testing and deconvolution of spectra for lithographic exposure radiation generating systems such as excimer or molecular fluorine laser or EUV source systemsLAMBDA PHYSIK AG·Filed 2002·Granted Mar 2, 2004·23 cites·1 claims
- 3582US6414978B2Discharge unit for a high repetition rate excimer or molecular fluorine laserLAMBDA PHYSIK AG·Filed 2001·Granted Jul 2, 2002·14 cites·11 claims
- 3682US6212214B1Performance control system and method for gas discharge lasersLAMBDA PHYSIK AG·Filed 1999·Granted Apr 3, 2001·46 cites·30 claims
- 3781US7266137B2Laser gas replenishment methodLAMBDA PHYSIK AG·Filed 2005·Granted Sep 4, 2007·5 cites·28 claims
- 3881US6608848B2Method and apparatus for wavelength calibrationLAMBDA PHYSIK AG·Filed 2001·Granted Aug 19, 2003·14 cites·43 claims
- 3981US6426966B1Molecular fluorine (F2) laser with narrow spectral linewidthLAMBDA PHYSIK AG·Filed 2000·Granted Jul 30, 2002·18 cites·26 claims
- 4081US6414828B1Laser ventilation systemLAMBDA PHYSIK AG·Filed 2000·Granted Jul 2, 2002·31 cites·33 claims
- 4180US6856638B2Resonator arrangement for bandwidth controlLAMBDA PHYSIK AG·Filed 2001·Granted Feb 15, 2005·20 cites·47 claims
- 4280US6495795B2Device for flushing the optical path of a UV laser beamLAMBDA PHYSIK AG·Filed 2000·Granted Dec 17, 2002·15 cites·16 claims
- 4380US6477192B2Device for on-line control of output power of vacuum-UV laserLAMBDA PHYSIK AG·Filed 2001·Granted Nov 5, 2002·13 cites·7 claims
- 4480US6463086B1Molecular fluorine laser with spectral linewidth of less than 1 pmLAMBDA PHYSIK AG·Filed 2002·Granted Oct 8, 2002·14 cites·25 claims
- 4580US6330267B1Performance control system and method for gas discharge lasersLAMBDA PHYSIK AG·Filed 2000·Granted Dec 11, 2001·16 cites·4 claims
- 4679US6970492B2DUV and VUV laser with on-line pulse energy monitorLAMBDA PHYSIK AG·Filed 2003·Granted Nov 29, 2005·15 cites·21 claims
- 4779US6735225B2Chirp compensation method and apparatusLAMBDA PHYSIK AG·Filed 2002·Granted May 11, 2004·18 cites·13 claims
- 4879US6345065B1F2-laser with line selectionLAMBDA PHYSIK AG·Filed 1999·Granted Feb 5, 2002·33 cites·22 claims
- 4978US6768765B1High power excimer or molecular fluorine laser systemLAMBDA PHYSIK AG·Filed 2002·Granted Jul 27, 2004·18 cites·43 claims
- 5078US6757315B1Corona preionization assembly for a gas laserLAMBDA PHYSIK AG·Filed 2000·Granted Jun 29, 2004·21 cites·50 claims
Showing the top 50 of 143 patent records by PatentIndex Score.
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