Assignee

LAN HONGBO

CN·2 granted patents·8 citations·filing 2011–2012

Technology mixB82Y2 G03F2 H01L1 H10H1

Top patents by PatentIndex Score

2 records

0180US8741199B2Method and device for full wafer nanoimprint lithographyLAN HONGBO·Filed 2011·Granted Jun 3, 2014·6 cites·8 claims
0269US9563119B2Large-area nanopatterning apparatus and methodLAN HONGBO·Filed 2012·Granted Feb 7, 2017·2 cites·13 claims

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