Assignee
LASERTEC CORP
JP·48 granted patents·33 pending applications·371 citations·filing 1996–2025
Top patents by PatentIndex Score
81 records- 0194US7692128B2Focus control method for an optical apparatus which inspects a photo-mask or the likeLASERTEC CORP·Filed 2007·Granted Apr 6, 2010·31 cites·9 claims
- 0293US6858859B2Optically scanning apparatus and defect inspection systemLASERTEC CORP·Filed 2002·Granted Feb 22, 2005·62 cites·27 claims
- 0392US6195202B1Laser microscope and a pattern inspection apparatus using such laser microscopeLASERTEC CORP·Filed 2000·Granted Feb 27, 2001·55 cites·17 claims
- 0490US9588421B2Pellicle inspection apparatusLASERTEC CORP·Filed 2015·Granted Mar 7, 2017·6 cites·12 claims
- 0589US9696568B2Light source apparatus and inspection apparatusLASERTEC CORP·Filed 2016·Granted Jul 4, 2017·6 cites·6 claims
- 0688US6043932ALaser microscope and a pattern inspection apparatus using such laser microscopeLASERTEC CORP·Filed 1998·Granted Mar 28, 2000·77 cites·6 claims
- 0786US12307736B2Image processing apparatus and image processing methodLASERTEC CORP·Filed 2022·Granted May 20, 2025·1 cites·7 claims
- 0886US2026099097A1Control apparatus and control methodLASERTEC CORP·Filed 2025·Application pending·0 cites
- 0984US10319088B2Inspection apparatus of EUV mask and its focus adjustment methodLASERTEC CORP·Filed 2017·Granted Jun 11, 2019·5 cites·14 claims
- 1084US7907270B2Inspection apparatus and method, and production method for pattern substratesLASERTEC CORP·Filed 2008·Granted Mar 15, 2011·9 cites·15 claims
- 1184US2026064011A1Optical apparatus and method for controlling optical apparatusLASERTEC CORP·Filed 2025·Application pending·0 cites
- 1281US9719859B2Interferometer and phase shift amount measuring apparatus with diffraction gratings to produce two diffraction beamsLASERTEC CORP·Filed 2014·Granted Aug 1, 2017·3 cites·12 claims
- 1380US9117869B2Chucking device and chucking methodLASERTEC CORP·Filed 2014·Granted Aug 25, 2015·4 cites·14 claims
- 1480US6727987B2Image pickup apparatus and defect inspection system for photomaskLASERTEC CORP·Filed 2001·Granted Apr 27, 2004·20 cites·26 claims
- 1580US2026016760A1Image processing apparatus, inspection apparatus, image processing method, and non-transitory computer readable mediumLASERTEC CORP·Filed 2025·Application pending·0 cites
- 1677US9638729B2Analysis apparatus and analysis methodLASERTEC CORP·Filed 2013·Granted May 2, 2017·3 cites·9 claims
- 1777US6665326B2Light source deviceLASERTEC CORP·Filed 2001·Granted Dec 16, 2003·19 cites·9 claims
- 1876US8879055B1Inspection method and inspection apparatusLASERTEC CORP·Filed 2014·Granted Nov 4, 2014·3 cites·14 claims
- 1976US6654110B2Image pickup apparatus and defect inspection apparatus for photomaskLASERTEC CORP·Filed 2002·Granted Nov 25, 2003·14 cites·12 claims
- 2076US2026099916A1Image processing method, image processing apparatus, and learning methodLASERTEC CORP·Filed 2025·Application pending·0 cites
- 2175US7643157B2Phase shift amount measurement apparatus and transmittance measurement apparatusLASERTEC CORP·Filed 2007·Granted Jan 5, 2010·8 cites·17 claims
- 2273US10645289B2Optical apparatus and vibration removing methodLASERTEC CORP·Filed 2017·Granted May 5, 2020·1 cites·10 claims
- 2373US10539511B2Detection method, inspection method, detection apparatus, and inspection apparatusLASERTEC CORP·Filed 2018·Granted Jan 21, 2020·1 cites·18 claims
- 2473US9551672B2Defect classifying method and optical inspection apparatus for silicon carbide substrateLASERTEC CORP·Filed 2014·Granted Jan 24, 2017·4 cites·46 claims
- 2572US2026044986A1Optical apparatus, inspection apparatus, image-capturing method, and non-transitory computer readable mediumLASERTEC CORP·Filed 2025·Application pending·0 cites
- 2671US9638739B2Defect coordinates measurement device, defect coordinates measurement method, mask manufacturing method, and reference maskLASERTEC CORP·Filed 2013·Granted May 2, 2017·2 cites·9 claims
- 2771US9013787B2Microscope and inspection apparatusLASERTEC CORP·Filed 2013·Granted Apr 21, 2015·2 cites·37 claims
- 2870US2026010078A1Light source apparatusLASERTEC CORP·Filed 2025·Application pending·0 cites
- 2969US2025357720A1Light source apparatusLASERTEC CORP·Filed 2025·Application pending·0 cites
- 3068US10712287B2Inspection device and inspection methodLASERTEC CORP·Filed 2019·Granted Jul 14, 2020·1 cites·12 claims
- 3168US9970885B2Inspection apparatus and inspection methodLASERTEC CORP·Filed 2014·Granted May 15, 2018·3 cites·14 claims
- 3268US2026006707A1Control apparatus and light source apparatusLASERTEC CORP·Filed 2025·Application pending·0 cites
- 3368US2025334885A1Light source apparatusLASERTEC CORP·Filed 2025·Application pending·0 cites
- 3468US2026099915A1Image processing method, image processing apparatus, and learning methodLASERTEC CORP·Filed 2025·Application pending·0 cites
- 3567US9991670B2Laser light source device and inspection deviceLASERTEC CORP·Filed 2015·Granted Jun 5, 2018·1 cites·7 claims
- 3667US7796343B2Photomask inspection apparatusLASERTEC CORP·Filed 2007·Granted Sep 14, 2010·2 cites·14 claims
- 3767US7548309B2Inspection apparatus, inspection method, and manufacturing method of pattern substrateLASERTEC CORP·Filed 2008·Granted Jun 16, 2009·2 cites·16 claims
- 3867US2025291262A1Optical apparatus and control method of optical apparatusLASERTEC CORP·Filed 2025·Application pending·0 cites
- 3967US2024280502A1Optical apparatus and focus correction methodLASERTEC CORP·Filed 2024·Application pending·0 cites
- 4065US12050184B2Mask inspection method and mask inspection apparatusLASERTEC CORP·Filed 2021·Granted Jul 30, 2024·0 cites·7 claims
- 4164US10706527B2Correction method, correction apparatus, and inspection apparatusLASERTEC CORP·Filed 2018·Granted Jul 7, 2020·1 cites·5 claims
- 4264US2025184611A1Image processing apparatus, inspection apparatus, review apparatus, image processing method, inspection method, and review methodLASERTEC CORP·Filed 2024·Application pending·0 cites
- 4364US2025176089A1Light source apparatus and optical apparatusLASERTEC CORP·Filed 2024·Application pending·0 cites
- 4461US12504270B2Calculation method, image-capturing method, and image-capturing apparatusLASERTEC CORP·Filed 2023·Granted Dec 23, 2025·0 cites·13 claims
- 4561US11353802B2Optical device, and method for preventing contamination of optical deviceLASERTEC CORP·Filed 2021·Granted Jun 7, 2022·0 cites·14 claims
- 4661US9544558B2Measuring apparatus and measuring methodLASERTEC CORP·Filed 2014·Granted Jan 10, 2017·2 cites·8 claims
- 4761US7764414B2Illumination apparatus and illumination methodLASERTEC CORP·Filed 2007·Granted Jul 27, 2010·2 cites·14 claims
- 4860US12308600B2Light source apparatus and inspection apparatusLASERTEC CORP·Filed 2022·Granted May 20, 2025·0 cites·8 claims
- 4960US9786057B2Inspection apparatus, coordinate detection apparatus, coordinate detection method, and wavefront aberration correction methodLASERTEC CORP·Filed 2015·Granted Oct 10, 2017·1 cites·12 claims
- 5060US2025380348A1Light source apparatus and method for controlling light source apparatusLASERTEC CORP·Filed 2025·Application pending·0 cites
Showing the top 50 of 81 patent records by PatentIndex Score.
Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →