Individual holder
LAUERHAAS JEFFREY M
US·2 granted patents·22 citations·filing 2009–2012
Individually held — no corporate assignee on record.
Top patents by PatentIndex Score
2 records- 0191US8235062B2Tools and methods for processing microelectronic workpieces using process chamber designs that easily transition between open and closed modes of operationLAUERHAAS JEFFREY M·Filed 2009·Granted Aug 7, 2012·18 cites·17 claims
- 0279US8684015B2Tools and methods for processing microelectronic workpieces using process chamber designs that easily transition between open and closed modes of operationLAUERHAAS JEFFREY M·Filed 2012·Granted Apr 1, 2014·4 cites·9 claims
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