Assignee

LAURENT THIBAULT SIMON MATHIEU

NL·2 granted patents·6 citations·filing 2011–2012

Technology mixG03F2 G01K1

Top patents by PatentIndex Score

2 records

0189US9298107B2Lithographic apparatus and methodLAURENT THIBAULT SIMON MATHIEU·Filed 2011·Granted Mar 29, 2016·6 cites·22 claims
0253US9141005B2Temperature sensing probe, burl plate, lithographic apparatus and methodLAURENT THIBAULT SIMON MATHIEU·Filed 2012·Granted Sep 22, 2015·0 cites·20 claims

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