Assignee
LAYH MICHAEL
DE·5 granted patents·1 pending application·18 citations·filing 2010–2013
Top patents by PatentIndex Score
6 records- 0191US9176390B2Method for adjusting an illumination system of a projection exposure apparatus for projection lithographyLAYH MICHAEL·Filed 2012·Granted Nov 3, 2015·8 cites·21 claims
- 0287US8724086B2Microlithographic projection exposure apparatus having a multi-mirror array with temporal stabilisationLAYH MICHAEL·Filed 2010·Granted May 13, 2014·4 cites·24 claims
- 0378US8891057B2Microlithographic projection exposure apparatusLAYH MICHAEL·Filed 2010·Granted Nov 18, 2014·2 cites·21 claims
- 0475US9007559B2EUV collector with cooling deviceLAYH MICHAEL·Filed 2011·Granted Apr 14, 2015·4 cites·13 claims
- 0543US9304400B2Illumination system for EUV microlithographyLAYH MICHAEL·Filed 2011·Granted Apr 5, 2016·0 cites·34 claims
- 0643US2013176546A1Illumination optical unit with a movable filter elementLAYH MICHAEL·Filed 2013·Application pending·0 cites
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