Assignee
LEBOUITZ KYLE S
US·3 granted patents·2 pending applications·4 citations·filing 2004–2010
Top patents by PatentIndex Score
5 records- 0159US8257602B2Pulsed-continuous etchingLEBOUITZ KYLE S·Filed 2006·Granted Sep 4, 2012·2 cites·7 claims
- 0254US9576824B2Etching chamber with subchamberLEBOUITZ KYLE S·Filed 2006·Granted Feb 21, 2017·2 cites·14 claims
- 0340US2005230046A1Apparatus for etching semiconductor samples and a source for providing a gas by sublimation theretoLEBOUITZ KYLE S·Filed 2004·Application pending·0 cites
- 0434US8703003B2Selective etching of semiconductor substrate(s) that preserves underlying dielectric layersLEBOUITZ KYLE S·Filed 2010·Granted Apr 22, 2014·0 cites·20 claims
- 0534US2012244715A1High-selectivity etching system and methodLEBOUITZ KYLE S·Filed 2010·Application pending·0 cites
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