Assignee
LEE ERIC M
US·4 granted patents·1 pending application·84 citations·filing 2006–2011
Top patents by PatentIndex Score
5 records- 0197US9139910B2Method for chemical vapor deposition controlLEE ERIC M·Filed 2010·Granted Sep 22, 2015·38 cites·20 claims
- 0297US8852347B2Apparatus for chemical vapor deposition controlLEE ERIC M·Filed 2010·Granted Oct 7, 2014·40 cites·22 claims
- 0389US9212420B2Chemical vapor deposition methodLEE ERIC M·Filed 2010·Granted Dec 15, 2015·6 cites·23 claims
- 0448US2012213929A1Method of operating filament assisted chemical vapor deposition systemLEE ERIC M·Filed 2011·Application pending·0 cites
- 0542US8956457B2Thermal processing system for curing dielectric filmsLEE ERIC M·Filed 2006·Granted Feb 17, 2015·0 cites·20 claims
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