Assignee
LEE HARRY Q
US·2 granted patents·1 pending application·4 citations·filing 2008–2012
Top patents by PatentIndex Score
3 records- 0169US8569174B2Using spectra to determine polishing endpointsLEE HARRY Q·Filed 2008·Granted Oct 29, 2013·3 cites·4 claims
- 0264US9168630B2User-input functions for data sequences in polishing endpoint detectionLEE HARRY Q·Filed 2012·Granted Oct 27, 2015·1 cites·20 claims
- 0339US2011282477A1Endpoint control of multiple substrates with multiple zones on the same platen in chemical mechanical polishingLEE HARRY Q·Filed 2010·Application pending·0 cites
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