Assignee
LEE SUNGTAE
JP·3 granted patents·3 citations·filing 2009–2011
Top patents by PatentIndex Score
3 records- 0164US8303719B2Deposit removing method and substrate processing methodLEE SUNGTAE·Filed 2009·Granted Nov 6, 2012·2 cites·7 claims
- 0259US8609549B2Plasma etching method, plasma etching apparatus, and computer-readable storage mediumLEE SUNGTAE·Filed 2011·Granted Dec 17, 2013·1 cites·12 claims
- 0350US8986561B2Substrate processing method and storage mediumLEE SUNGTAE·Filed 2009·Granted Mar 24, 2015·0 cites·33 claims
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