Assignee
LEE WILLIAM D
US·9 granted patents·2 pending applications·18 citations·filing 2008–2012
Top patents by PatentIndex Score
11 records- 0178US9711324B2Inert atmospheric pressure pre-chill and post-heatLEE WILLIAM D·Filed 2012·Granted Jul 18, 2017·5 cites·20 claims
- 0277US8270142B2De-clamping wafers from an electrostatic chuckLEE WILLIAM D·Filed 2008·Granted Sep 18, 2012·6 cites·18 claims
- 0369US9236216B2In-vacuum high speed pre-chill and post-heat stationsLEE WILLIAM D·Filed 2012·Granted Jan 12, 2016·3 cites·24 claims
- 0469US8524584B2Carbon implantation process and carbon ion precursor compositionLEE WILLIAM D·Filed 2011·Granted Sep 3, 2013·2 cites·14 claims
- 0564US8330129B1Uniformity of a scanned ion beamLEE WILLIAM D·Filed 2011·Granted Dec 11, 2012·1 cites·27 claims
- 0662US9048276B2Matched coefficient of thermal expansion for an electrostatic chuckLEE WILLIAM D·Filed 2011·Granted Jun 2, 2015·1 cites·12 claims
- 0747US8241425B2Non-condensing thermos chuckLEE WILLIAM D·Filed 2009·Granted Aug 14, 2012·0 cites·11 claims
- 0840US2011291030A1Active dew point sensing and load lock venting to prevent condensation on workpiecesLEE WILLIAM D·Filed 2011·Application pending·0 cites
- 0939US8692215B2Heated rotary seal and bearing for chilled ion implantation systemLEE WILLIAM D·Filed 2011·Granted Apr 8, 2014·0 cites·15 claims
- 1037US2011291022A1Post Implant Wafer Heating Using LightLEE WILLIAM D·Filed 2010·Application pending·0 cites
- 1136US9558980B2Vapor compression refrigeration chuck for ion implantersLEE WILLIAM D·Filed 2010·Granted Jan 31, 2017·0 cites·17 claims
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