Assignee

LEE WILLIAM DAVID

US·2 granted patents·8 citations·filing 2008–2010

Technology mixB23Q1 C23C1 H01L1 H02N1 H10P1

Top patents by PatentIndex Score

2 records

0186US8182861B2Methods and devices for monitoring and controlling thin film processingLEE WILLIAM DAVID·Filed 2010·Granted May 22, 2012·6 cites·41 claims
0261US9036326B2Gas bearing electrostatic chuckLEE WILLIAM DAVID·Filed 2008·Granted May 19, 2015·2 cites·19 claims

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