Assignee
LEPTON INC
US·3 granted patents·18 citations·filing 1989–1993
Top patents by PatentIndex Score
3 records- 0157US5455427ALithographic electron-beam exposure apparatus and methodsLEPTON INC·Filed 1993·Granted Oct 3, 1995·15 cites·10 claims
- 0230US4932872AMethod for fabricating X-ray masksLEPTON INC·Filed 1989·Granted Jun 12, 1990·3 cites·1 claims
- 0328US5020083AX-ray masks, their fabrication and useLEPTON INC·Filed 1989·Granted May 28, 1991·0 cites·6 claims
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