Assignee
LERCH WILFRIED
DE·2 granted patents·1 pending application·5 citations·filing 2009–2016
Top patents by PatentIndex Score
3 records- 0168US8716153B2Device and method for producing dielectric layers in microwave plasmaLERCH WILFRIED·Filed 2009·Granted May 6, 2014·3 cites·14 claims
- 0264US10867825B2Wafer boat and treatment apparatus for wafersLERCH WILFRIED·Filed 2016·Granted Dec 15, 2020·2 cites·17 claims
- 0323US2018076070A1Plasma-treatment device for wafersLERCH WILFRIED·Filed 2016·Application pending·0 cites
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