Assignee
LEWINGTON RICHARD
0 granted patents·3 pending applications·0 citations·filing 2005–2006
Top patents by PatentIndex Score
3 records- 0148US2008099437A1Plasma reactor for processing a transparent workpiece with backside process endpoint detectionLEWINGTON RICHARD·Filed 2006·Application pending·0 cites
- 0244US2006154388A1Integrated metrology chamber for transparent substratesLEWINGTON RICHARD·Filed 2005·Application pending·0 cites
- 0342US2008099451A1Workpiece rotation apparatus for a plasma reactor systemLEWINGTON RICHARD·Filed 2006·Application pending·0 cites
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