Assignee
LIAN LEI
US·2 granted patents·1 pending application·20 citations·filing 2006–2014
Top patents by PatentIndex Score
3 records- 0191US9200950B2Pulsed plasma monitoring using optical sensor and a signal analyzer forming a mean waveformLIAN LEI·Filed 2014·Granted Dec 1, 2015·19 cites·20 claims
- 0268US8130382B2Determining endpoint in a substrate processLIAN LEI·Filed 2011·Granted Mar 6, 2012·1 cites·20 claims
- 0339US2007249071A1Neural Network Methods and Apparatuses for Monitoring Substrate ProcessingLIAN LEI·Filed 2006·Application pending·0 cites
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