Assignee
LIGHT SCOTT L
US·3 granted patents·16 citations·filing 2010–2011
Top patents by PatentIndex Score
3 records- 0192US8575032B2Methods of forming a pattern on a substrateLIGHT SCOTT L·Filed 2011·Granted Nov 5, 2013·16 cites·35 claims
- 0251US8845908B2Reticles, and methods of mitigating asymmetric lens heating in photolithographyLIGHT SCOTT L·Filed 2010·Granted Sep 30, 2014·0 cites·24 claims
- 0342US8728721B2Methods of processing substratesLIGHT SCOTT L·Filed 2011·Granted May 20, 2014·0 cites·12 claims
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