Assignee
LIPHARDT MARTIN M
US·19 granted patents·51 citations·filing 2006–2024
Top patents by PatentIndex Score
19 records- 0187US8436994B2Fast sample height, AOI and POI alignment in mapping ellipsometer or the likeLIPHARDT MARTIN M·Filed 2011·Granted May 7, 2013·7 cites·7 claims
- 0286US8339603B1Mapping ellipsometers and polarimeters comprising polarization state compensating beam directing means, and method of useLIPHARDT MARTIN M·Filed 2009·Granted Dec 25, 2012·10 cites·17 claims
- 0383US8339602B1View-finder in ellipsometer or the like systemsLIPHARDT MARTIN M·Filed 2009·Granted Dec 25, 2012·8 cites·16 claims
- 0482US10247611B1Enhanced detector operation made possible by application of a functional plurality of gratings and combination dichroic beam splitter-prismsLIPHARDT MARTIN M·Filed 2015·Granted Apr 2, 2019·3 cites·30 claims
- 0582US8953030B1System for viewing samples that are undergoing ellipsometric investigation in real timeLIPHARDT MARTIN M·Filed 2012·Granted Feb 10, 2015·4 cites·4 claims
- 0682US8248606B1Sample mapping in environmental chamberLIPHARDT MARTIN M·Filed 2009·Granted Aug 21, 2012·7 cites·11 claims
- 0773US8749782B1DLP base small spot investigation systemLIPHARDT MARTIN M·Filed 2011·Granted Jun 10, 2014·3 cites·15 claims
- 0871US12498317B1Sample alignment system in reflectometers, ellipsometers, spectrophotometers and the likeLIPHARDT MARTIN M·Filed 2024·Granted Dec 16, 2025·0 cites·12 claims
- 0968US8983787B1Method of evaluating data qualityLIPHARDT MARTIN M·Filed 2012·Granted Mar 17, 2015·1 cites·8 claims
- 1068US8638437B2System and method of aligning a sampleLIPHARDT MARTIN M·Filed 2011·Granted Jan 28, 2014·1 cites·14 claims
- 1168US8416410B1Conjugate ratio adjustable lens systemLIPHARDT MARTIN M·Filed 2010·Granted Apr 9, 2013·1 cites·20 claims
- 1267US8064055B2System and method of aligning a sampleLIPHARDT MARTIN M·Filed 2009·Granted Nov 22, 2011·5 cites·7 claims
- 1365US8600703B1Method of evaluating data qualityLIPHARDT MARTIN M·Filed 2009·Granted Dec 3, 2013·1 cites·12 claims
- 1453US8159672B1Sample investigating system and method of useLIPHARDT MARTIN M·Filed 2009·Granted Apr 17, 2012·0 cites·13 claims
- 1552US11885738B1Reflectometer, spectrophotometer, ellipsometer or polarimeter system including sample imaging system that simultaneously meet the scheimpflug condition and overcomes keystone errorLIPHARDT MARTIN M·Filed 2020·Granted Jan 30, 2024·0 cites·15 claims
- 1645US8587781B2View-finder in ellipsometer or the like systemsLIPHARDT MARTIN M·Filed 2012·Granted Nov 19, 2013·0 cites·5 claims
- 1744US8189193B1System and method of applying horizontally oriented arc-lamps in ellipsometer or the like systemsLIPHARDT MARTIN M·Filed 2009·Granted May 29, 2012·0 cites·5 claims
- 1843US7738105B1System and method of applying horizontally oriented arc-lamps in ellipsometer or the like systemsLIPHARDT MARTIN M·Filed 2006·Granted Jun 15, 2010·0 cites·3 claims
- 1936US9658151B2System for viewing samples that are undergoing ellipsometric investigation in real timeLIPHARDT MARTIN M·Filed 2015·Granted May 23, 2017·0 cites·6 claims
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