Assignee
LIU BENJAMIN Y H
US·9 granted patents·600 citations·filing 1975–2012
Top patents by PatentIndex Score
9 records- 0197US8711338B2Apparatus for counting particles in a gasLIU BENJAMIN Y H·Filed 2012·Granted Apr 29, 2014·550 cites·10 claims
- 0295US8465791B2Method for counting particles in a gasLIU BENJAMIN Y H·Filed 2010·Granted Jun 18, 2013·21 cites·10 claims
- 0391US8511583B2Fine droplet atomizer for liquid precursor vaporizationLIU BENJAMIN Y H·Filed 2011·Granted Aug 20, 2013·5 cites·4 claims
- 0482US8603580B2High stability and high capacity precursor vapor generation for thin film depositionLIU BENJAMIN Y H·Filed 2006·Granted Dec 10, 2013·4 cites·14 claims
- 0566US8132793B2Method and apparatus for liquid precursor atomizationLIU BENJAMIN Y H·Filed 2009·Granted Mar 13, 2012·6 cites·15 claims
- 0662US8393599B2Apparatus for liquid precursor atomizationLIU BENJAMIN Y H·Filed 2012·Granted Mar 12, 2013·2 cites·7 claims
- 0751US8728240B2Apparatus for vapor condensation and recoveryLIU BENJAMIN Y H·Filed 2012·Granted May 20, 2014·0 cites·4 claims
- 0850US9089800B2Method and apparatus for vapor and gas filtrationLIU BENJAMIN Y H·Filed 2012·Granted Jul 28, 2015·0 cites·20 claims
- 0945US3997433AMethod and apparatus for generating dry dust particlesLIU BENJAMIN Y H·Filed 1975·Granted Dec 14, 1976·12 cites·41 claims
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